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Template:Microtechnology
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Technology and applied science templates
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Microtechnology
MEMS
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MST
·
Micromachinery
Basic structures
Interdigital transducer
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Cantilever
·
Microchannel
Applications
Sensors
Microbolometer
Actuators
Comb drive
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Scratch Drive Actuator
·
Thermal actuator
Switches
Digital micromirror device
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Optical switch
Other
IBM Millipede
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RF-MEMS
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MOEMS
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Microphotonics
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Bio-MEMS
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Microfluidics
·
Micropower
Processes
General
Surface micromachining
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Bulk micromachining
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HAR micromachining
·
Deposition
·
Lithography
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Etching
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Wire bonding
Specific
LOCOS
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STI
·
LIGA
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HexSil
·
SIMPLE
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SCREAM
·
Lift-off
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Photolithography
·
SOI
·
Smart Cut
